基于COMSOL Multiphysics对超声波电机压电振子谐振特性进行了理论分析，建立了超声波电机压电振子的实体模型，仿真计算出了压电振子的谐振频率，确定超声波电动机的最佳工作频段，提出了电机与驱动电路匹配方法。试验结果表明：当对压电振子施加幅值为100 V的激励电压后，软件分析和数学计算基本一致，可见仿真分析方法的可行性，为研究超声波电机谐振特性提供了一种简便的计算方法。

The resonant feature of the piezoelectric resonator of ultrasonic motor is analyzed based on the COMSOL Multiphysics in this paper. The entity model of the piezoelectric resonator of ultrasonic motor has been established. The resonant frequency of the piezoelectric resonator was calculated by the simulation and the best operating frequency range of ultrasonic motor was determined. The matching method between the motor and the driving circuit was proposed. The test results showed that when an exciting voltage with the amplitude of 100 V was applied to the piezoelectric resonator, the software analysis results were basically consistent with the mathematical calculation thus indicated that the method of simulation analysis was feasible. This provides a simple calculation method for the study of the resonant feature of ultrasonic motor.

TM571