The high stability of the operating frequency of SAW filter during a wide range of temperature is the key factor of spectrum controlling in the electronic system. The temperature compensated technology has become the main technical direction of the current SAW filter development. A temperature compensated SAW filter technological scheme based on multi-layer micro-structure piezoelectric material was presented in this paper. The design and simulation of temperature compensated SAW filter based on lithium tantalite (LT) piezoelectric substrate were realized and satisfied results were obtained. The temperature coefficient of frequency (TCF) of SAW filter, which was based on a overlapping of LT on Si wafer, is up to 25×10-6/℃ during the full temperature range (-55 ℃ to +85 ℃). The temperature coefficient of frequency (TCF) of SAW filter based on SiO2/LT temperature compensated method is less than 10×10-6/℃. The developed temperature compensated SAW filters (TC-SAWFs) have been applied to the systems.