沟槽电极型声表面波耐高温谐振器的制备
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张启轮(1997-),男,辽宁省鞍山市人,硕士生,主要从事声表面波传感器的研究。通信作者:韩韬(1973-),男,山东省济南市人,教授

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国家自然科学基金与航天先进制造技术研究联合基金资助项目(U1837210)

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Manufacturing Process of SAW Resonators with Grooved Electrodesfor High Temperature Application
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    摘要:

    声表面波(SAW)传感器在高温环境的需求日益增多,硅酸镓镧因为具有良好的高温特性而提供了耐高温压电基底,但是电极在高温条件下会发生团聚而失效。该文设计了一种沟槽电极结构的耐高温SAW谐振器,采用Pt作为电极,硅酸镓镧作为压电基底,并提出了沟槽结构叉指电极的制造工艺,对沟槽结构的形貌进行了表征。通过提高沉积温度改善Pt电极质量,最终制备的波长8 μm、沟槽电极厚240 nm的谐振器在1 000 ℃下可稳定工作。

    Abstract:

    The demand of surface acoustic wave(SAW) sensors for high temperature is increasing. Langasite provides high-temperature-resistant piezoelectric substrate because of good high-temperature characteristics, however, the electrode will lose its performance due to agglomeration at high temperature. In this paper, a surface acoustic wave resonator with grooved electrodes for high temperature is designed. Pt is used as electrode and langasite is used as piezoelectric substrate. The manufacturing process of the grooved electrodes is proposed and the morphology of the grooved electrode is characterized. The quality of Pt electrodes is improved by increasing the deposition temperature. Finally, a resonator with the wavelength of 8 μm and grooved IDTs of 240 nm in thickness is prepared which can work stably at 1 000 ℃.

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张启轮,单清川,李桦林,骆伟,史汝川,郝文昌,尹玉刚,韩韬.沟槽电极型声表面波耐高温谐振器的制备[J].压电与声光,2022,44(2):175-179. ZHANG Qilun, SHAN Qingchuan, LI Hualin, LUO Wei, SHI Ruchuan, HAO Wenchang, YIN Yugang, HAN Tao. Manufacturing Process of SAW Resonators with Grooved Electrodesfor High Temperature Application[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2022-05-11
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