Cu/15°YX-LiNbO3SAW谐振器的横向模抑制研究
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肖强(1992-),男,湖北省潜江市人,工程师,博士,主要从事声表面波器件设计、超声成像及传感器检测的研究

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Study on Transverse Modes Suppression of the Cu/15°YX-LiNbO3SAW Resonator
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    摘要:

    Cu/15°YX-LiNbO3声表面波(SAW)谐振器作为宽带SAW滤波器的核心单元,其横向模式的存在极大地影响了SAW滤波器的通带性能,将引起带内波纹,增大器件插损,从而降低系统信噪比,引起信号误读。该文基于Piston技术抑制Cu/15°YX-LiNbO3 SAW谐振器的横向模式,利用有限元仿真优化了指条末端尺寸。仿真结果表明,慢速区域尺寸占空比为0.692,长度约为0.65λ(λ为波长)时,主模附近的横向模得到完全抑制,并通过实验验证了其有效性。这为Piston技术应用于Cu/15°YX-LiNbO3宽带SAW滤波器的横向模抑制提供了指导。

    Abstract:

    The Cu/15°YX-LiNbO3 surface acoustic wave(SAW) resonator is a key element of the wide band SAW filter.The existence of spurious transverse modes of the resonator will greatly deteriorate the passband performance of the SAW filter,which will cause the passband ripples and increase the insert losses, so as to reduce the signal-to-noise ratio of the system and cause signal misreading. The transverse modes suppression of the Cu/15°YX-LiNbO3 SAW resonator with the Piston technique was studied in this paper.The end size of the finger was optimized by the finite element method.The simulated results show that the spurious transverse modes around the main mode can be completely suppressed when the duty ratio and the length of the slow region are 0.692 and 0.65λ, respectively.The effectiveness of the simulation was verified experimentally.This offers a foundation for the application of the Piston technique to the transverse modes suppression of the wide band SAW filter with a structure of Cu/15°YX-LiNbO3.

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肖强,董加和,白涛,陈彦光,陈尚权,李桦林,陈正林,马晋毅. Cu/15°YX-LiNbO3SAW谐振器的横向模抑制研究[J].压电与声光,2022,44(2):202-204. XIAO Qiang, DONG Jiahe, BAI Tao, CHEN Yanguang, CHEN Shangquan, LI Hualin, CHEN Zhenglin, MA Jinyi. Study on Transverse Modes Suppression of the Cu/15°YX-LiNbO3SAW Resonator[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2022-05-11
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