基于液压放大的压电微动平台设计与试验
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许有熊(1980-),男,福建省晋江市人,副教授,博士。

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国家自然科学基金资助项目(52375292);江苏省研究生科研与实践创新计划基金资助项目(SJCX23_1190)

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Piezoelectric Micro-Motion Platform Based on Hydraulic Amplification
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    摘要:

    针对传统微动平台难以满足微/纳米定位的要求,该文结合液压放大原理,提出一种基于液压放大的两自由度压电微动平台,并对其进行了结构设计。采用正交设计方法对其进行有限元双向流固耦合分析,优化了其结构参数。研制了实物样机并进行试验研究。开环控制试验结果表明,当压电驱动器输入为90 μm时,压电微动平台最大输出位移为603.0 μm,放大倍数约为6.7;闭环控制试验结果表明,采用分段微分、积分、比例(PID)算法能降低超调量,且响应时间、稳态时间均减小,稳态误差降低(为±0.2 μm),实现了微动平台的大范围输出精密定位。

    Abstract:

    In response to the difficulty of traditional micro-motion platforms in meeting the requirements of micro/nano positioning, a two degree-of-freedom piezoelectric micro-motion platform based on hydraulic amplification is proposed and its structural design is created. The orthogonal design method was used to analyze the bidirectional fluid-structure coupling and optimize its structural parameters. A physical prototype was developed and experimental research was conducted. The open-loop experimental results show that when a 90 μm displacement is input into the piezoelectric actuator, the maximum displacement of the piezoelectric micro-motion platform is 603.0 μm, and the magnification is approximately 6.7. The closed-loop control experimental results show that using a segmented PID algorithm can reduce the overshoot, shorten the response and steady-state times, and reduce the steady-state error to ±0.2 μm. Thus, the micro-motion platform can realize precise large-scale positioning.

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许有熊,庄广锋,陈星宇,李恭乐.基于液压放大的压电微动平台设计与试验[J].压电与声光,2024,46(2):273-279. XU Youxiong, ZHUANG Guangfeng, CHEN Xingyu, LI Gongle. Piezoelectric Micro-Motion Platform Based on Hydraulic Amplification[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2023-11-17
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  • 在线发布日期: 2024-04-19
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