采用了溶胶凝胶技术在不锈钢基体上制备了厚为10 μm、结构致密的锆钛酸铅(PZT)厚膜。研究了不同退火条件对厚膜结晶状况的影响，X射线衍射分析表明,采用700 ℃退火处理20 min后得到了PZT厚膜的纯钙钛矿相结构。厚膜的电学性能测试结果显示，厚膜的剩余极化强度（Pr）为7.5 μC/cm2， 矫顽场强（Ec）为7.2 V/μm，压电常数（d33）为73 pC/N。设计制作了长20 mm、宽4 mm的压电悬臂梁结构振动能量收集器。输出性能测试结果显示，振动频率为95 Hz，采集器输出电压最高，输出电压值为862 mV。

A dense PZT thick film with a thickness of 10 μm was prepared on a stainless steel substrate using a SolGel technique.The effects of annealing conditions on the crystallization of thick films were investigated.X ray diffraction analysis showed that the pure perovskite phase of the PZT thick films was obtained after annealing at 700 ℃ with 20 min.The electrical properties of the films showed that the residual polarization (Pr) was 7.5 μC/cm2,the coercive field strength (Ec) was 7.2 V/μm,and the piezoelectric constant (d33) was 73 pC/N.A vibration energy harvester with piezoelectric cantilever structure of length of 20 mm and width of 4 mm was designed and manufactured. The output performance test results showed that the vibration frequency was 95 Hz,the collector output voltage was the highest,and the output voltage value was 862 mV.

TN384;TM215

国家自然科学基金青年基金资助项目（51505265）