高精度半球陀螺球面电极刻蚀
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民用航天预研项目

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Spherical Electrode Etching of High Precision Hemispherical Gyroscope
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    摘要:

    半球谐振陀螺球面电极的刻蚀精度直接影响了谐振子驻波的控制准确性,以及在特定方位角读出信号采集的精度。该文采用激光对准的方式实现了半球陀螺超高对称球面电极的刻蚀,克服了传统对准法的低精度缺陷,将控制电极和读出电极的位置偏差角降低1个数量级(误差角±0.2°),有效提高了半球谐振陀螺制造精度。

    Abstract:

    The etching accuracy of the spherical electrode of the hemispherical resonator gyro(HRG) directly influences the control accuracy of the oscillator standing wave and the accuracy of the readout signal acquisition at a given azimuth angle.In this paper, the laser alignment method is adopted to realize the etching of hemispherical ultrahigh symmetrical spherical electrodes, which overcomes the shortcomings of the conventional alignment method.The position deviation angles of the control electrode and the readout electrode are reduced by one orders of magni tude(error angle ±0.2°),which effectively improves the manufacturing accuracy of the hemispherical resonator gyro.

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谭文跃, 方针, 刘书海, 余波, 李陟, 贺海平, 邱海莲.高精度半球陀螺球面电极刻蚀[J].压电与声光,2017,39(5):646-648. TAN Wenyue, FAN Zhen, LIU Shuhai, YU Bo, LI Zhi, HE Haiping, QIU Hailian. Spherical Electrode Etching of High Precision Hemispherical Gyroscope[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2017-10-10
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