A new heating method for the microfluidic in a specific area of an array chip is presented in this paper. A 4×4 array polydimethylsiloxane chip with heating elements are developed. Sixteen IDTs are fabricated on a 128°YX-LiNbO3 substrate for exciting surface acoustic waves, which are used to drive the oil droplet on the piezoelectric substrate to transport the oil droplet to the heat pillar in the area to be heated. The IDTs at side of the oil droplet are applied to an electric signal.The oil droplet is then heated, and the temperature of the microfluid to be heated in the array chip is raised due to the thermal transmittance of the heat transfer pillar. The microfluidic heating experiment of the array chip in a specific area is carried out with the paraffin oil microfluid as the experimental object.The results show that surface acoustic wave can heat the paraffin oil microfluid in the specific area of the array chip.The temperature of 7.5 μL paraffin oil is raised from 22.3 ℃ to 33.5 ℃ at 30.0 dBm electric signal power.
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王保成, 章安良.阵列式芯片特定区域内微流体加热研究[J].压电与声光,2017,39(5):790-793. WANG Baocheng, ZHANG Anliang. Study on Microfluidic Heating in a Specific Area of an Array Chip[J]. PIEZOELECTRICS AND ACOUSTOOPTICS