CMUT非线性机理及抑制方法
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国家重点研发计划基金资助项目(2016YFC0101900);国家自然科学基金资助项目(61127008)

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Nonlinear Mechanism and Suppression Method of CMUT
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    摘要:

    在平行板电容模型中,静电力在电容式微机械超声换能器(CMUT)的工作中发挥着不可替代的作用,由于静电力具有非线性,使得CMUT在发射过程中存在非线性特性。为消除、抑制CMUT的非线性,应用的方法有:去除直流偏置电压,此方法虽然可消除CMUT非线性,但会严重影响发射声压、灵敏度和机电耦合系数等性能;根据功率谱抑制效果,改变激励源信号类型抑制非线性,仿真结果显示余弦信号、阶跃脉冲信号和双极性方波信号对CMUT非线性的抑制分别为-6 dB、-10 dB、-19 dB;依据倍角公式,采用线性和非线性补偿方法抑制非线性,仿真结果显示,对CMUT非线性的抑制分别为-87 dB、-78 dB。经过仿真分析得出,采用线性和非线性补偿法来抑制CMUT非线性,效果明显,优于前两种方法。

    Abstract:

    In the parallel plate capacitance model,the electrostatic force plays an irreplaceable role in the operation of CMUT.Due to the nonlinearity of the electrostatic force, the CMUT has nonlinear characteristics during the launching process. In order to eliminate and suppress the nonlinearity of CMUT, three methods are applied. Removing the DC bias voltage.Although this method can eliminate CMUT nonlinearity, it will seriously affect the performance of the emission sound pressure, sensitivity and electromechanical coupling coefficient. Changing the signal type of excitation source to suppress nonlinearity according to the effect of power spectrum suppression.The simulation results show that the suppression of CMUT nonlinearity by the cosine signal,step pulse signal and bipolar square wave is -6 dB,-10 dB and -19 dB respectively. Suppressing the nonlinearity of CMUT by adopting the linear and nonlinear compensation methods according to the double angle formula. The simulation results indicate that the suppression of CMUT nonlinearity by the linear and nonlinear compensation method is -87 dB and -78 dB respectively. From the simulation results, we come to the conclusion that the nonlinearity of the CMUT can be obviously suppressed by adopting the linear and nonlinear compensation method, which is superior to the former two methods.

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吕云飞,王红亮,王朝杰. CMUT非线性机理及抑制方法[J].压电与声光,2018,40(2):265-268. LYU Yunfei, WANG Hongliang, WANG Chaojie. Nonlinear Mechanism and Suppression Method of CMUT[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2018-04-16
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