By optimizing the high frequency transducer design and extra thin piezoelectric film preparation technique, a BAW delay line same operated at K band has been fabricated in this work. The operating center frequency of 23.8 GHz, insertion loss of 51.9 dB, bandwidth of 1 122 MHz, delay time of 299 ns, feed through suppression (FTS) of 29 dB and triple transmitting suppression (TTS) of 40 dB have been achieved.
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毛世平,李文豪,江洪敏,郑泽渔. K波段BAW器件技术研究[J].压电与声光,2018,40(3):313-315. MAO Shiping, LI Wenhao, JIANG Hongmin, ZHENG Zeyu. Study on K Band BAW Device Technology[J]. PIEZOELECTRICS AND ACOUSTOOPTICS