毛世平, 李文豪, 江洪敏, 郑泽渔.K波段BAW器件技术研究[J].压电与声光,2018,40(3):313-315.MAO Shiping, LI Wenhao, JIANG Hongmin, ZHENG Zeyu.Study on K Band BAW Device Technology[J].PIEZOELECTRICS AND ACOUSTOOPTICS
K波段BAW器件技术研究
Study on K Band BAW Device Technology
  
DOI:10.11977/j.issn.1004-2474.2018.03.001
中文关键词:  体声波(BAW)  延迟线  换能器  压电薄膜
英文关键词:BAW  delay line  transducer  piezoelectric film
基金项目:国家科技部重点研发计划项目资助
作者单位
毛世平, 李文豪, 江洪敏, 郑泽渔 (中国电子科技集团公司第二十六研究所重庆 400060) 
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中文摘要:
      通过优化高频换能器设计、极薄压电薄膜制备等技术,试制出了K波段BAW延迟线样品。其工作中心频率为23.8 GHz,插入损耗为51.9 dB,带宽为1 122 MHz,延迟时间为299 ns,直通抑制为29 dB,3次渡越抑制为40 dB。
英文摘要:
      By optimizing the high frequency transducer design and extra thin piezoelectric film preparation technique, a BAW delay line same operated at K band has been fabricated in this work. The operating center frequency of 23.8 GHz, insertion loss of 51.9 dB, bandwidth of 1 122 MHz, delay time of 299 ns, feed through suppression (FTS) of 29 dB and triple transmitting suppression (TTS) of 40 dB have been achieved.
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