贾乐1, 高杨2, 3, 韩超1.体声波谐振器MASON模型改进的方法[J].压电与声光,2018,40(3):352-355.JIA Le 1, GAO Yang2, 3, HAN Chao1.A Modified Method of MASON Model for Bulk Acoustic Wave Resonators[J].PIEZOELECTRICS AND ACOUSTOOPTICS
体声波谐振器MASON模型改进的方法
A Modified Method of MASON Model for Bulk Acoustic Wave Resonators
  
DOI:10.11977/j.issn.1004-2474.2018.03.012
中文关键词:  体声波谐振器  Mason模型  损耗机制  模型改进  寄生参数
英文关键词:bulk acoustic wave resonator  Mason model  loss mechanism  model modification  parasitic parameter
基金项目:国家自然科学基金资助项目(61574131);中国工程物理研究院超精密加工技术重点实验室基金资助项目(2014ZA001);核探测与核电子学国家重点实验室开放课题基金资助项目(2016KF 02);西南科技大学特殊环境机器人技术四川省重点实验室开放基金资助项目(14ZXTK01);西南科技大学研究生创新基金资助项目 (16ycx101)
作者单位
贾乐1, 高杨2, 3, 韩超1 (1.西南科技大学 信息工程学院四川 绵阳 6210102.中国工程物理研究院 电子工程研究所四川 绵阳 621999 3.中国科学院 高能物理研究所 核探测与核电子学国家重点实验室北京 100049) 
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中文摘要:
      为了更精确的模拟薄膜体声波谐振器(FBAR)特性,提出了一种改进FBAR Mason模型的方法。首先采用有限元仿真法将FBAR压电层的机械损耗和介质损耗考虑在内进行仿真。得到的导纳曲线数据利用等效介电常数法导入FBAR的电磁模型中,可以模拟FBAR电极的欧姆损耗和引线损耗等,仿真得到FBAR的阻抗曲线。通过阻抗曲线拟合的方式提取MBVD模型参数。借鉴MBVD模型参数改进FBAR的Mason模型。对比拟合结果发现,FBAR电磁模型的仿真结果在串联谐振点处向左偏移。推测是由于电磁模型中引入寄生参数,故在改进的Mason模型中加入寄生电感参数后仿真,此时仿真所得的FBAR阻抗特性曲线与电磁模型仿真结果曲线吻合,验证了猜想,且得到了较精确的FBAR Mason模型。
英文摘要:
      In order to simulate the characteristics of thin film bulk acoustic resonator (FBAR) more accurately, a method to modify the FBAR Mason model is presented in this paper. Firstly, the finite element simulation method is used to simulate FBAR, including the mechanical loss and dielectric loss of piezoelectric layer. The obtained admittance curve data is imported into the electromagnetic (EM) model of FBAR by using the equivalent permittivity method, and then the ohmic loss and conductor loss of FBAR electrode can be simulated to obtain the impedance curve of FBAR. The parameters of MBVD model are extracted by fitting impedance curve. The Mason model of FBAR is modified by using MBVD model parameters for reference. Compared with the fitting results, it is found that the series resonance point of FBAR EM model is shifted to the left. It is presumed that the parasitic parameters are introduced into the EM model. Therefore, the parasitic inductance parameters are added to the modified Mason model. At this time, the impedance characteristic curve obtained by the simulation is in good agreement with the simulation result curve of the EM model. The presumption has been verified and a more accurate FBAR Mason model has been obtained.
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