黄子吉1,2, 白忠臣1,2, 任哲毅1,2, 王宝1,2, 陆安江1.基于RCWA方法设计的甲醛传感器的研究[J].压电与声光,2018,40(3):389-394.HUANG Ziji1,2, BAI Zhongchen1,2, REN Zheyi1,2, WANG Bao1,2, LU Anjiang1.Study on Formaldehyde Sensor Based on RCWA Method[J].PIEZOELECTRICS AND ACOUSTOOPTICS
基于RCWA方法设计的甲醛传感器的研究
Study on Formaldehyde Sensor Based on RCWA Method
  
DOI:10.11977/j.issn.1004-2474.2018.03.020
中文关键词:  光学传感器  甲醛溶液  严格耦合波分析法(RCWA)  透射光谱  传感特性
英文关键词:optical sensor  formaldehyde solution  rigorous coupled wave analysis (RCWA)method  transmission spectrum  sensing characteristic
基金项目:国家科技支撑计划基金资助项目(2015BAK28B02);国家国际合作专项基金资助项目(2014DFA00670);贵州省科技重大专项基金资助项目(黔科合重字[2016]3022号)
作者单位
黄子吉1,2, 白忠臣1,2, 任哲毅1,2, 王宝1,2, 陆安江1 (1.贵州大学 大数据与信息工程学院,贵州 贵阳 5500252.贵州省光电子技术及应用重点实验室,贵州 贵阳 550025) 
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中文摘要:
      针对日常生活中甲醛损害人们健康的问题,该文采用严格耦合波分析(RCWA)法设计了一种能快速、高精度实时检测甲醛溶液浓度的光学传感器。该传感器以多孔二氧化锆(ZrO2)介孔材料作为甲醛的承载单元,TiO2和SiO2光栅分别作为波导层和光耦合层构成的层状复合结构。利用RCWA法计算了该传感器的透射光谱,建立了透射共振峰波长与待测甲醛溶液浓度间的关系模型,并分析了其传感特性。结果表明,该传感器具有较高的灵敏度和良好的重复稳定性,品质因数Q=1 261,灵敏度可达0.101 nm/%,并可实现对待测甲醛溶液浓度的实时动态监测。
英文摘要:
      Aiming at the problem that the formaldehyde damages human health in daily life, an optical sensor capable of detecting the concentration of formaldehyde solution rapidly and accurately in real time is designed by using the rigorous coupled wave analysis (RCWA) method. The sensor uses the porous zirconia (ZrO2) mesoporous material as the bearing unit of formaldehyde,and the titanium dioxide (TiO2) and silicon dioxide (SiO2) gratingsact as a layered composite structure composed of a waveguide layer and an optical coupling layer respectively.The transmission spectrum of the sensor is calculated by RCWA method. The relationship model between the wavelength of the transmission resonance peak and the concentration of the formaldehyde solution to be measured is established and its sensing characteristics are analyzed. The results show that the sensor has high sensitivity and good repeatablestability, the quality factor Q is 1 261, the sensitivity is up to 0.101 nm/%, and the real time dynamic monitoring of the concentration of formaldehyde solution can be realized.
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