Aiming at the problems of nonorthogonal zero bias error and temperature drift error in the practical use of MEMS accelerometer,a hybrid error calibration compensation algorithm was proposed in this paper.By analyzing the relationship between the accelerometer temperature and error, the error model of the accelerometer output at different temperature intervals was established.The 12position calibration method was used to calibrate and compensate the nonorthogonal zero bias error of the accelerometer in each temperature interval to obtain accurate zero bias and scale factor.At the same time,the least squares method was used to fit the onedimensional relationship function among the zero bias and scale factor and temperature, and finally the dynamic error compensation under different temperature ranges was realized.The experimental results show that the proposed algorithm can increase the accuracy of the accelerometer output by one order of magnitude, and the compensation effect is obvious.