The temperature characteristics of the Rayleigh wave mode resonant frequency and the bulk acoustic wave mode resonant frequency of SAW resonators based on La3Ga5SiO14 (LGS) piezoelectric substrate were studied in this work. Based on these two modes, a dualmode temperature sensor with wide temperature range and linear output characteristic was proposed. The results show that the resonance frequencies of both the Rayleigh wave mode and the bulk wave mode of the LGS resonator are a quadratic function of temperature. And the secondorder frequency temperature coefficients of these two resonance modes are nearly equal. The temperature measured by the proposed dualmode temperature sensor is the same as that measured by the thermocouple. The dualmode temperature sensor proposed in this work has linear output characteristic in the whole temperature range and can be used in the high temperature SAW temperature sensor based on LGS.
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喻恒,彭斌,李凌,张万里. LGS声表面波双模温度传感器研究[J].压电与声光,2018,40(5):650-652. YU Heng,, PENG Bin,, LI Ling,, ZHANG Wanli. Dual-mode SAW Temperature Sensor Based on LGS[J]. PIEZOELECTRICS AND ACOUSTOOPTICS