The miniaturization of the driving circuit of ultrasonic motor is becoming more and more important in the ultrasonic application system. Based on the 0.35 μm bipolarcomplementary metal oxide semiconductordouble diffused metal oxide semiconductor(BCD) process, a monolithic integrated ultrasonic motor driving circuit chip is designed in this work. The chip consists of a nonsynchronous peak current mode boost circuit and two halfbridge drivers. The peak current mode boost circuit provides power for the halfbridge driver. Two square waves with the phase difference of 90° which output from two halfbridge drivers with adaptive deadtime controller are used to drive the ultrasonic motor.
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刘泽浪,罗萍,黄龙.一种用于超声电机驱动的半桥集成电路的设计[J].压电与声光,2018,40(6):843-846. LIU Zelang, LUO Ping, HUANG Long. Design of a Halfbridge Integratedcircuit Driver for Ultrasonic Motor[J]. PIEZOELECTRICS AND ACOUSTOOPTICS