In this paper, the vibration characteristics of two kinds of standingwave ultrasonic motor stator with the diameter of 10 mm were simulated and analyzed by the finite element method. The models of the ultrasonic motor stator were established with ANSYS software. The finite element model of the stator was established by ANSYS finite element software. The vibration modal and harmonic responses were simulated and analyzed. The main vibration mode, modal frequency and amplitude of the stator were obtained. The effects of two kinds of piezoelectric ceramics (PZTs) and the stator lengths on the resonance frequency and amplitude were discussed. The results show that the slanting groove or helical tooth structure of the standing wave type ultrasonic motor can realize modal conversion, which is the key to realize motor drive. Among the eight stators of the two standing wave ultrasonic motors analyzed, the amplitude of the stator of the slanting groove ultrasonic motor with PZT4 piezoelectric material and length of 16 mm is the largest.