考虑封装的SAW谐振式传感器仿真研究
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国家重点研发计划基金资助项目(2016YFB0402705);国家自然科学基金资助项目(61627816)

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Study on Simulation of SAW Resonant Sensor Considering Packaging
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    摘要:

    针对小体积射频声表面波(SAW)传感器性能受封装影响大的问题,该文提出了耦合模(COM)模型与三维电磁分析结合的仿真方法。利用COM模型计算出芯片的单端口〖WTBX〗S〖WTBZ〗参数;使用三维电磁场仿真软件HFSS对表面贴装的陶瓷封装结构进行建模,仿真计算出封装的〖WTBX〗S〖WTBZ〗参数;对芯片及封装结构〖WTBX〗S〖WTBZ〗参数在电路仿真软件ADS中进行结合,得出考虑封装的SAW谐振式传感器仿真结果。实验制作了工作在428.5 MHz的SAW单端谐振传感器,采用该文所述方法仿真的理论结果与实验测量结果更接近,验证了上述方法的可行性。

    Abstract:

    Aiming at the problem that the performance of RF SAW sensor with small size is influenced significantly by the package, a simulation method combing the couplingofmodes (COM) model and the 3D electromagnetic analysis has been presented in this paper. First, the single port S parameter of the chip was calculated by using COM model. Then the model of the ceramic package structure with surface mounting is established by using the high frequency structure simulator (HFSS) and its S parameter is calculated. Lastly, the simulation results of SAW resonant sensor considering package are obtained by combining the S parameters of the chip and the package structure in ADS software. The SAW single port resonant sensor operating at 428.5 MHz has been fabricated experimentally. The simulation result obtained by using the method described in this article is more close to the experimental results, which verified the feasibility of the abovementioned method.

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蔡飞达,李红浪,柯亚兵,田亚会,卢孜筱.考虑封装的SAW谐振式传感器仿真研究[J].压电与声光,2019,41(1):9-11. CAI Feida, LI Honglang, KE Yabing, TIAN Yahui, LU Zixiao. Study on Simulation of SAW Resonant Sensor Considering Packaging[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2018-08-13
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