基于钝化微分的压电微动平台PID控制
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国家自然科学基金资助项目(51675288);宁波市工业攻关重大专项基金资助项目(2016B10017)

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PID Control of Piezoelectric Micropositioning Stage Based on Passivation Differential
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    摘要:

    为避免压电微动平台在工作过程中受到扰动或冲击,采用改进比例、积分、微分(PID)控制器对其进行控制。首先,在平台的PID控制器中引入低通滤波器,以降低微分环节对扰动或冲击的敏感性(即使微分环节对扰动或冲击产生钝化效应),进而设计出了压电微动平台的改进PID控制器;接着,基于所搭建的压电微动平台位移测量系统,实验验证了所设计的钝化微分PID控制器的效果。实验结果表明,在钝化微分PID控制作用下,平台具有较快的响应,达到5 μm阶跃目标的响应时间为0.3 s,无超调;平台的定位误差显著减小,在跟踪最大值为15.25 μm的变幅值三角波时,定位误差中线由无控制时的-0.7~1.2 μm减小为-0.1~0.1 μm。

    Abstract:

    In order to avoid the piezoelectric micropositioning stage being disturbed or impacted during the working process, it is controlled by the improved proportional, integral and differential (PID) controller. At First, the low pass filter is introduced into the PID controller of the stage to reduce the sensitivity of the differential element to disturbance or impact (that is, making the differential element produce passivation effect on the disturbance or impact), and then an improved PID controller of piezoelectric micropositioning stage is designed. Then, based on the builtin the displacement measuring system with the piezoelectric micropositioning stage, the effect of the designed passivation differential PID controller has been verified experimentally. The results show that the stage has a fast response under the control of passivation differential PID, and the response time of 5 μm step target is up to 0.3 s without overshooting. The positioning error is significantly reduced. When tracking the variable amplitude triangle wave with a maximum value of 15.25 μm, the location error center line is reduced from -0.7~1.2 μm without control to -0.1~0.1 μm.

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刘尔春,孙庆龙,卢志诚,惠相君,周鹏飞,汪家乐,孙靖康,崔玉国.基于钝化微分的压电微动平台PID控制[J].压电与声光,2019,41(1):89-93. LIU Erchun, SUN Qinglong, LU Zhicheng, HUI Xiangjun, ZHOU Pengfei, WANG Jiale, SUN Jingkang, CUI Yuguo. PID Control of Piezoelectric Micropositioning Stage Based on Passivation Differential[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2018-08-13
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