剪切式压电喷头多致动壁结构制备及特性分析
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苏州清华创新引领行动专项基金资助项目(2016SZ0304);国家自然科学基金资助项目(51675054、51775302);北京市自然科学基金资助项目(3172013);北京市教委科技发展计划面上基金资助项目(KM201711232005)

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Preparation and Characteristic Analysis for Multiactuating Wall Structure of Shear Mode Piezoelectric Inkjet Head
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    摘要:

    剪切式压电喷头多致动壁结构是压电喷头的核心部件,针对国外在这一领域的长期垄断,通过对致动壁的特性分析,设计了剪切式压电喷头多致动壁结构,并探索出一种改进的制备工艺。通过极化、切割、二次极化、镀电极和焊线工艺,制备出长、宽、高分别为9.5 mm、70 μm、400 μm的致动壁和液体腔。在有限元分析软件COMSOL下构建致动壁结构仿真模型并进行测试实验。结果显示,壁间电压在0~60 V内,致动壁振动位移与其施加电压大小呈近似线性关系,仿真与实验与结果平均偏差约为4 nm,最大偏差6.4 nm,两者吻合度达87%,符合喷墨要求,为剪切式喷头的研制提供了应用可行性。

    Abstract:

    The multiactuating wall structure of shear mode piezoelectric inkjet head is the core component of the piezoelectric inkjet head. Aiming at the longterm monopoly of foreign countries in this field, by analyzing the characteristic of multiactuating wall structure, a multiactuating wall structure of piezoelectric inkjet head was designed in this paper and an improved process for preparing the multiactuating wall structure was explored. Through polarizing, cutting, secondary polarizing, plated electrode and wire bonding, the actuating wall and liquid cavity structure with length, width and height of 9.5 mm, 70 μm and 400 μm respectively were fabricated. The simulation model of actuating wall structure was established and the test experiment was carried out through the finite element analysis software of COMSOL. The results of test showed that the vibration displacement of the actuating wall was approximately linear with the applied voltage when the voltage between the wall was in the range of 0~60 V. The average deviation between the simulation result and experiment result was about 4 nm, and the maximum deviation was 6.4 nm, and coincidence between the simulation result and the experiment was up to 87%, which met the requirements of inkjet, and provided application feasibility for the development of shear mode piezoelectric inkjet head.

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冯金磊,李东,孔全存,李勇,赵翔.剪切式压电喷头多致动壁结构制备及特性分析[J].压电与声光,2019,41(1):135-140. FENG Jinlei, LI Dong, KONG Quancun, LI Yong, ZHAO Xiang. Preparation and Characteristic Analysis for Multiactuating Wall Structure of Shear Mode Piezoelectric Inkjet Head[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2018-08-13
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