Abstract:The multiactuating wall structure of shear mode piezoelectric inkjet head is the core component of the piezoelectric inkjet head. Aiming at the longterm monopoly of foreign countries in this field, by analyzing the characteristic of multiactuating wall structure, a multiactuating wall structure of piezoelectric inkjet head was designed in this paper and an improved process for preparing the multiactuating wall structure was explored. Through polarizing, cutting, secondary polarizing, plated electrode and wire bonding, the actuating wall and liquid cavity structure with length, width and height of 9.5 mm, 70 μm and 400 μm respectively were fabricated. The simulation model of actuating wall structure was established and the test experiment was carried out through the finite element analysis software of COMSOL. The results of test showed that the vibration displacement of the actuating wall was approximately linear with the applied voltage when the voltage between the wall was in the range of 0~60 V. The average deviation between the simulation result and experiment result was about 4 nm, and the maximum deviation was 6.4 nm, and coincidence between the simulation result and the experiment was up to 87%, which met the requirements of inkjet, and provided application feasibility for the development of shear mode piezoelectric inkjet head.