国防基础科研计划基金资助项目(JCKY2016210B010)
彭华东,徐阳,张永川,杜波,司美菊,蒋欣,赵明. X波段FBAR用AlN薄膜制备研究[J].压电与声光,2019,41(2):170-172. PENG Huadong, XU Yang, ZHANG Yongchuan, DU Bo, SI Meiju, JIANG Xin, ZHAO Ming. Preparation of AlN Films for X Band FBAR Devices[J]. PIEZOELECTRICS AND ACOUSTOOPTICS
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