压电微夹钳的迟滞及蠕变补偿
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国家自然科学基金资助项目(51175271)

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Hysteresis and Creep Compensation of Piezoelectric Microgripper
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    摘要:

    为提高压电微夹钳的操作精度,对其迟滞及蠕变误差进行补偿。基于压电材料迟滞曲线的非对称性,为提高微夹钳迟滞模型的精度,采用升回程分别建模的方法,建立了微夹钳的PrandtlIshlinskii(PI)迟滞模型,对迟滞误差进行了补偿;在综合考虑模型简单且具有较高精度的前提下,采用二阶惯性环节建立了微夹钳的蠕变模型,设计出无需求蠕变逆模型的补偿器,对蠕变误差进行了补偿;实验结果表明,在最大位移为120 μm时,钳指位移的迟滞误差由补偿前的-11.8~10.7 μm减小为-1.7~1.0 μm。在900 s作用时间内,钳指位移的蠕变由补偿前的4 μm几乎减小为0。

    Abstract:

    In order to improve the operation precision of the piezoelectric microgripper, the hysteresis and creep errors are compensated. Based on the asymmetry of hysteresis curve of piezoelectric materials, the PrandtlIshlinskii (PI) hysteresis model of microgripper is established by using the modeling method of lift back to improve the precision of the hysteresis model of the microgripper, and the hysteresis error is compensated. Under the premise of considering the simplicity and accuracy of the model, the creep model of microgripper is established by using the twoorder inertial links, and a compensator with no demand of the creep inverse model is designed to compensate the creep error. The hysteresis and creep compensation experimental results show that the hysteresis displacement error of the microgripper finger is reduced from -11.8~10.7 μm before compensation to -1.7~1.0 μm when the maximum displacement is 120 μm. During the action time of 900 s, the creep of the microgripper finger is almost reduced from 4 μm before compensation to 0.

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卢志诚,刘文翠,惠相君,周鹏飞,孙靖康,汪家乐,崔玉国.压电微夹钳的迟滞及蠕变补偿[J].压电与声光,2019,41(2):244-248. LU Zhicheng, LIU Wencui, HUI Xiangjun, ZHOU Pengfei, SUN Jingkang, WANG Jiale, CUI Yuguo. Hysteresis and Creep Compensation of Piezoelectric Microgripper[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2019-04-18
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