A piezoplane motor driven by the teethshaped statoris presented in this paper. The outofplane bending vibration, inplane transverse tooth bending vibration, and inplane longitudinal tooth bending vibration were selected as the working modesof the stator. Through the vibration coupling of the outofplane bending vibrationwith the inplane longitudinal tooth bending vibration and the inplane transverse tooth bending vibration respectively, the elliptical trajectories along the xOz and yOz planesare generated on the longitudinal and transverse teeth driving feet respectively to drive the movers to move along the x and y directions. The motion principle of the motor is introduced. The stator size is optimized based on the frequency consistency objective, and the optimum driving frequency of the motor is determined to be 30 800 Hz.An electromechanical coupling analysis model of the stator is established. The Rayleigh damping of the stator is calculatedand the elliptical trajectories of the driving feet are simulated. The simulation results show that the amplitudes of the driving feet at the xdirection, ydirection and zdirection are 2.1 μm, 2.6 μm and 2.0 μm respectively at 250 V of voltage excitation. The influences of the drive voltage, frequencyand phase difference on the motor amplitude are analyzed.