A new type of piezoelectric pump has been designed to decrease the size for new applications.The driving principle,mechanical structure,fabrication method and mechanical features of the pump have been studied in this paper.First,the operating principle of the single chamber and single vibrator pump was introduced.Then,a new type of metal check valve was proposed.This new valve was a whole action check valve thus the service life could be increased.The fabrication practice of the pump's components and the si...