声表面波器件小型化技术发展概述
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Overview of the Development of SAW Miniaturization Technology
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    摘要:

    以EPCOS生产的声表面波(SAW)芯片级封装和晶圆级封装为例,介绍了声表面波器件小型化发展的趋势。着重介绍了声表器件芯片级封装技术发展的各个阶段器件的结构特点。详述采用倒装、贴膜和晶圆键合技术将声表面波器件的尺寸减至最小及后续声表面波器件组件化封装的趋势。

    Abstract:

    The development of SAW device miniaturization was introduced with the SAW chip scaled and wafer leveled packages of EPCOS as examples.The construction features of SAW device chip scaled package in various development stages were especially presented in this paper.Since the flip chip technique,the film lamination technique and the wafer bonding technique was used,the SAW device size was reduced to the extreme.The development trend of SAW modularization package was also presented in this paper.

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米佳,李晖.声表面波器件小型化技术发展概述[J].压电与声光,2012,34(1):4-6. MI Jia, LI Hui. Overview of the Development of SAW Miniaturization Technology[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2013-04-09
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