华晨辉,李彦彦.MEMS超声分离腔二维简正模式谐振频率的研究[J].压电与声光,2012,34(1):81-85.HUA Chenhui,LI Yanyan.Research on Two Dimensional Normal Vibration Modes Resonance Frequency of MEMS Ultrasonic Separator[J].PIEZOELECTRICS AND ACOUSTOOPTICS
MEMS超声分离腔二维简正模式谐振频率的研究
Research on Two Dimensional Normal Vibration Modes Resonance Frequency of MEMS Ultrasonic Separator
  
DOI:10.11977/j.issn.1004-2474.2012.01.021
中文关键词:  简正模式  驻波  超声分离  等效电路
英文关键词:normal vibration modes  standing wave  ultrasonic separation  equivalent circuit
基金项目:
作者单位
华晨辉 1.电子科技大学 成都学院四川 成都 611731 
李彦彦 2.河南城建学院 土木与材料工程系河南 平顶山 467036 
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中文摘要:
      以基于二维简正模式的微机电系统(MEMS)超声分离器的结构模型为研究对象,首先根据声电类比原理,得到超声分离腔的二维等效电路模型,通过该模型分析计算二维简正模式的谐振频率;接着通过Ansys软件对MEMS超声分离器进行有限元的仿真分析,验证了等效电路模型的可行性,并得到了最佳激发频率;最后在实验中分别采用单片PZT激发(2,1)阶和双片反相位PZT激发(1,1)阶的简正模式,均取得了一定分离的效果。
英文摘要:
      A structure model of Micro Electro Mechanical System (MEMS) ultrasonic separator which based on the two dimensional normal vibration modes was chosen as the research object in this paper. Firstly,in accordance with the theory of electricity sound analogy,a two dimensional equivalent circuit model of the rectangular section of the fluid cavity was figured out.According to this model, the resonance frequencies of the two dimensional normal mode were listed.Secondly,Simulations using finite element method with ANSYS software was used to demonstrate the validity of the model and helped to select the best exciting frequencies;in the end the frequencies of two dimensional normal vibration modes(2,1) and (1,1) were chosen in this paper to excite the ultrasonic.The results showed good separation.
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