A closed loop control method of the vacuum microelectronic accelerometer based on the PID control arithmetic was presented to improve its linearity.The mathematic model of the closed loop accelerometer was established and simulated.The control circuit was realized and tested based on TMS320VC5416.The test results showed thao the scale factor of accelerometer was 0.212 7,full scale output voltage was 0.427 3 V and non linearity was less or equal to 0.98%.during the test range of ±10 m/s2).The circuit can realize good closed loop control of the accelerometer.