引信用MEMS悬臂梁式压电射流发电机设计分析
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国防预研基金资助项目(62301060506)

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Design and Analysis of MEMS Cantilever Air Driven Fluidic Piezoelectric Generator for Fuze
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    摘要:

    针对目前引信用压电式气流谐振发电机体积大,压电膜片难以达到谐振状态,且有输出电压低等缺点,结合常用射流发电机原理和微机电系统(MEMS)制造工艺,提出了一种MEMS压电式射流发电机,其以悬臂梁式压电膜片代替压电膜片结构发电,并通过双向流固耦合分析及压电仿真等对发电机的性能进行了验证,结果表明,MEMS压电式射流发电机可满足低功耗引信使用,且具有结构简单,体积小,输出电压高等特点。

    Abstract:

    Due to the great bulk of the piezoelectric air resonance generator, it is difficult to achieve resonance and the output voltage is low. In this case, a novel micro air driven fluidic resonance generator based on common jet generator principles and MEMS process technology is proposed. This generator use cantilever type piezoelectric vibrator instead of piezoelectric film for power generation. The FSI and Piezoelectric simulation results show that the new MEMS Piezoelectric Generator can meet the low cost requirement of fuze. Further more it has the features of simple structure, small size and high output voltage.

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徐伟,王炅,陆静,聂伟荣,方治森.引信用MEMS悬臂梁式压电射流发电机设计分析[J].压电与声光,2012,34(2):257-261. XU Wei, WANG Jiong, LU Jing, NIE Weirong, FANG Zhisen. Design and Analysis of MEMS Cantilever Air Driven Fluidic Piezoelectric Generator for Fuze[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2012-09-29
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