This paper presents a de embedding way to measure one port resonators. This way is to make the fixture errors be equivalent to three systematic errors,then the short, open and load situation of the fixture was measured directly by the Vector Network Analyzer and these three systematic errors were obtained,the actual S parameter of the measured device could be calculated.The optimized program was written to fit the actual admittance curve,thus the equivalent circuit components values and Q factor could be calculated accurately.The experiment has demonstrated the de embedding measuring method was effective and suitable for SAW one port resonator as well as STW one port resonator.