缓冲层和外部电阻抗对薄膜体声波谐振器频率特性的影响
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国家自然科学基金资助项目(50902062); 教育部留学回国人员科研启动基金资助项目

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The Effect of Passive Layer and External Electric Impedance on the Frequency Characteristics of Thin Film Bulk Acoustic Resonators (FBAR)
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    摘要:

    通过在AlN薄膜体声波谐振器上引入压电缓冲层和外部电阻抗来调节谐振器的频率特性,在考虑了缓冲层和外部电阻抗后,得到薄膜谐振器的输入电阻抗公式,并用来描述器件的机电行为。通过计算阻抗 频率谱评估了薄膜谐振器的频率特性和有效机电耦合系数k2eff,研究了缓冲层和外部电阻抗包括电阻、电感、电容对薄膜谐振器的阻抗 频率谱的影响。计算结果表明,外部电阻抗的引入可根本上改变薄膜谐振器的共振频率,且对k2eff有重要的影响。

    Abstract:

    For an AlN thin film bulk acoustic resonator (FBAR), a passive piezoelectric layer and external electrical impedance are introduced into the thin film resonator structure for tuning the frequency characteristics of the resonator. The input electric impedance formula for the thin film resonator, after taking into account the passive piezoelectric layer and external impedance, is derived to describe the electromechanical behavior of the device. The frequency characteristics and effective electromechanical coupling coefficient k2eff of the thin film resonator are evaluated based on the calculated impedance frequency spectra. The effect of the external electric impedance, including electric resistance, inductance and capacitance, on the impedance frequency spectra of thin film resonator is investigated, and the calculation results reveal that the use of external electric impedance can substantially change the resonance frequency and has a significant effect on k2eff of the resonator.

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李瑛娟,马吉,米亚,陈清明.缓冲层和外部电阻抗对薄膜体声波谐振器频率特性的影响[J].压电与声光,2012,34(3):340-346. LI Yingjuan, MA Ji, MI YA, CHEN Qingming. The Effect of Passive Layer and External Electric Impedance on the Frequency Characteristics of Thin Film Bulk Acoustic Resonators (FBAR)[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2012-09-27
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