A new type of C form MEMS planar microsprings are designed and the elastic coefficient Formula of the C form MEMS planar microsprings in three directions (x direction, y direction and z direction) is derived by using Card′s second law and Hooke's law and ANSYS finite element simulation results verify the correctness formula.On the basis of the formula and simulation，the law of various structural parameters on the impact of elasticity are studied.
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吴鹏飞,张国俊,钟志亲,戴丽萍,王姝娅. C型MEMS平面微弹簧弹性系数研究[J].压电与声光,2012,34(3):470-472. WU Pengfei, ZHANG Guojun, ZHONG Zhiqin, DAI Liping, WANG Shuya. Study on the Elastic Coefficient of C form MEMS Planar Microsprings[J]. PIEZOELECTRICS AND ACOUSTOOPTICS