杜春晖,何常德,葛晓洋,于佳琪,熊继军,张文栋.MEMS压阻式加速度传感器的优化设计[J].压电与声光,2012,34(6):848-852.DU Chunhui,HE Changde,GE Xiaoyang,YU Jiaqi,XIONG Jijun,ZHANG Wendong.Optimization Design of MEMS Piezoresistive Acceleration Sensor[J].PIEZOELECTRICS AND ACOUSTOOPTICS
MEMS压阻式加速度传感器的优化设计
Optimization Design of MEMS Piezoresistive Acceleration Sensor
  
DOI:10.11977/j.issn.1004-2474.2012.06.011
中文关键词:  电阻对称分布  抗耦合性  压阻式  三维  加速度传感器
英文关键词:varistor symmetric distribution  anti coupling  piezoresistive  three dimensional  acceleration sensor
基金项目:国家“八六三”计划基金资助项目(2011AA040404);国家自然科学基金资助项目(51075375)
作者单位
杜春晖 (1.中北大学 仪器科学与动态测试教育部重点实验室山西 太原030051 
何常德 2.中北大学 测试技术重点实验室山西 太原 030051) 
葛晓洋  
于佳琪  
熊继军  
张文栋  
摘要点击次数: 1695
全文下载次数: 676
中文摘要:
      提出了一种新型的MEMS压阻式加速度传感器,该传感器采用“四悬臂梁 质量块”结构,16个压敏电阻完全对称布放于悬臂梁上应力变化的线性区,既提高了传感器的灵敏度,又降低了轴间耦合度和非线性度。通过与八悬臂梁结构的仿真对比,得出该传感器具有更高的抗横向耦合性,约为八悬臂梁结构的30倍。
英文摘要:
      A new type of MEMS piezoresistive acceleration sensor is put forward. The structure of this sensor is “4 beam/mass” with completely symmetric distribution of 16 varistors in the stress linear region of the beam. The advantages of this structure are that the sensitivity of the sensor is improved, and the cross axis couple degree and non linearity are decreased. Compared with the sensor with “8 beam/mass” structure, it can be concluded that this acceleration sensor has larger anti lateral coupling degree, which is about 30 times higher than that of “8 beam/mass” structure.
查看全文  查看/发表评论  下载PDF阅读器
关闭