MEMS process has been widely used to manufacture a variety of silicon based thin film devices.Surface acoustic wave(SAW) device is a kind of MEMS devices with excellent properties.In this paper,The ZnO/Si based SAW devices were simulated by COMSOL Multiphysics and the S11 parameters were obtained.According to the simulation results, we manufactured the ZnO/Si based SAW devices.ZnO thin film with good (002) orientation was deposited by radio frequency(RF) magnetron sputtered.The ZnO/Si based SAW device with center frequency of 111.6 MHz has been obtained and the result is close to that obtained by the simulation structure.