新型压电叠堆式步进直线精密驱动器设计
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国家自然科学基金资助项目(50605027)

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Design of Novel Sophisticated Stepping Linear Piezoelectric Stack Actuator
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    摘要:

    提出了以压电叠堆作为驱动源的新型步进直线精密驱动器,分析了步进直线驱动器的工作原理,设计步进直线驱动器结构及其控制电压波形。为减少驱动器部件间摩擦,构建了滚动直线滑轨与驱动器结合的结构模型。制作了步进直线精密驱动器样机,并对样机进行实验测试,实验结果表明,驱动器的最小步距为0.05 μm,最高运行速度为610 μm/s,且运动性能稳定。

    Abstract:

    A novel sophisticated stepping linear actuator was proposed based on piezoelectric stack as actuator element. Its working principle was analyzed, and the structure of the stepping linear actuator and control wave voltage were designed. A model of actuator with linear rolling guide was established for reducing the sliding friction between the parts of actuator. A prototype of actuator was made, and its performance was tested. The experimental results show that the actuator has minimum step distance of 0.05 μm and maximum speed of 610 μm/s, it works steadily.

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苏江,刘鹏,杨志刚.新型压电叠堆式步进直线精密驱动器设计[J].压电与声光,2013,35(3):383-386. SU Jiang, LIU Peng, YANG Zhigang. Design of Novel Sophisticated Stepping Linear Piezoelectric Stack Actuator[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2013-06-19
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