A novel sophisticated stepping linear actuator was proposed based on piezoelectric stack as actuator element. Its working principle was analyzed, and the structure of the stepping linear actuator and control wave voltage were designed. A model of actuator with linear rolling guide was established for reducing the sliding friction between the parts of actuator. A prototype of actuator was made, and its performance was tested. The experimental results show that the actuator has minimum step distance of 0.05 μm and maximum speed of 610 μm/s, it works steadily.
参考文献
相似文献
引证文献
引用本文
苏江,刘鹏,杨志刚.新型压电叠堆式步进直线精密驱动器设计[J].压电与声光,2013,35(3):383-386. SU Jiang, LIU Peng, YANG Zhigang. Design of Novel Sophisticated Stepping Linear Piezoelectric Stack Actuator[J]. PIEZOELECTRICS AND ACOUSTOOPTICS