A passive and wireless pressure sensor based on surface acoustic wave(SAW) was proposed in order to measure the pressure in slit between two curved surfaces. Firstly, the sensing scheme about curved slit stress measuring was discussed. The force sensitive structure model in elastic medium was analyzed and the detailed sizes of SAW resonator were determined. Secondly, combining with MEMS process manufacture of the device was researched including the process of SAWR, supporting bases and transmission line. By exploring this passive and wireless SAW measuring method, the new thoughts were valuable for physical measurement in extreme environment such as slits.
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李海宁,丁杰雄,姜忠,付陆元.用于狭缝中的SAW应力传感器的设计与制作[J].压电与声光,2013,35(6):771-774. LI Haining, DING Jiexiong, JIANG Zhong, FU Luyuan. Design and Process of SAW Stress Sensor in Slit[J]. PIEZOELECTRICS AND ACOUSTOOPTICS