低噪声压电电荷放大器的设计与实验研究
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国家重点基础研究发展计划基金资助项目(2011CB302101);中央高校基本科研业务费专项基金资助项目(WK2090090008)

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Design and Experimental Study on Low Noise Piezoelectric Charge Sensitive Amplifier (CSA)
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    摘要:

    压电悬臂梁以其优越的性能在微纳米领域得到广泛应用。为了降低压电悬臂梁信号采集中的噪声,该文针对一种冷放电电荷放大器进行了详细的理论与仿真分析。设计实现了电荷 电压灵敏度为23.4 mV/pC的冷放电电荷放大器,并将其应用于压电悬臂梁纳米量级位移信号采集中。实验结果表明,冷放电电荷放大器具有优于经典电荷放大器的噪声特性,与理论预期、仿真分析结果相符。冷放电电荷放大器为低噪声压电信号采集提供了一种新选择。

    Abstract:

    Piezoelectric cantilever has been extensively used in MEMS/NEMS for its superior performance. In order to reduce noise in piezoelectric cantilever signal acquisition, a comprehensive theoretical and numerical analysis of a cold discharge charge sensitive amplifier is conducted in the paper. A cold discharge charge sensitive amplifier with charge voltage sensitivity of 23.4 mV/pC is designed and utilized in piezoelectric cantilever displacement sensing system with resolution on the order of nanometer. Experimental results indicate that cold discharge charge sensitive amplifier does exhibit superior noise performance than classic charge sensitive amplifier, which matches well with theoretical expectation and simulation result. Cold discharge charge sensitive amplifier is a new choice for low noise piezoelectric signal acquisition.

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孙颖奇,李保庆,马剑强,张天磊,褚家如.低噪声压电电荷放大器的设计与实验研究[J].压电与声光,2013,35(6):833-837. SUN Yingqi, LI Baoqing, MA Jianqiang, ZHANG Tianlei, CHU Jiaru. Design and Experimental Study on Low Noise Piezoelectric Charge Sensitive Amplifier (CSA)[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2013-11-26
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