The surface acoustic wave(SAW) temperature sensor is simulated using finite element software COMSOL.ZnO film on YX cut quartz crystal is used as base material for SAW temperature sensor,and aluminum electrodes are used as the inter digital transducer and reflectors.The impact of the performance of SAW temperature sensor due to the change of the height of inter digital transducer and the metallization ratio is studied through simulation.According to the result of the simulation,SAW temperature sensor plated on ZnO films is designed and produced. Test results show features of high sensitivity(8.8 kHz/℃) and very small error with good temperature frequency characteristics.