The hemispherical resonator is the crucial part of hemispherical resonator gyroscope (HRG), and its′ performance parameters are the key factors of fabricating the hemispherical resonator gyroscope with high accuracy. Aiming at the complex structure, multi layers defective and mass unbalance of the shell, the optimization of two main parameters of hemispherical resonator: the Q factor and the frequency diversity,by using the chemical treatment technique and the ion beam balancing technology is discussed in this paper. The experimental results show that the techniques have significant effectiveness.