A solenoid type micro inductor with magnetic core was designed with micro electro mechanical systems (MEMS) techniques such as dry etching, photolithography and electroplating. The equivalent series resistance, equivalent series inductance and impedance of the micro inductor from different frequencies were simulated by finite element analysis (FEA) method with COMSOL Multiphysics software. It showed that the inductance was about 27 nH and the resistance was about 9 Ω from 1 kHz to 1 MHz, and the RF simulation results showed that the self resonant frequency was 0.45 GHz.