新型声表面波湿度传感器的研究
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江苏基础研究计划基金资助项目(SBK200930229);近代声学教育部重点实验室(南京大学)基金资助项目(0806)

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Study on a Novel SAW Humidity Sensor
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    摘要:

    乐甫(Love)波其质点振动方向垂直于传播方向,同时又平行于基片表面,在基片法线方向上无振动分量。因此当基于Love波的电子器件在接触液体时Love波能量损耗很少,因而乐甫波声表面波(SAW)传感器主要用于液相检测。在石英上表面及在其上面淀积的SiO2薄膜中激发、传播的乐甫波对SiO2薄膜质量的变化很敏感,因此该文研究了基于乐甫波的湿度传感器感知气体环境的湿度含量。该文乐甫波湿度传感器采用42.75°Y-旋转切割石英基片,传播方向为[0°,132.75°,90°]。吸湿膜采用APCVD制作的多孔SiO2薄膜,此类膜比PECVD制作的SiO2膜疏松,吸湿、脱湿迅速。传感器灵敏度为62 kHz/%RH,最大湿滞约3%,测得的湿敏特性、迟滞特性表明,Love波SAW湿度传感器线性度较好,实验验证了该结构具有很好的气体测试前景。

    Abstract:

    Love wave mode based on waveguide with shear horizontal polarization and normal to propagation direction, is suitable for sensing liquid media due to low propagation loss occurred on its propagation route. The love wave excited and propagated on quartz surface and deposited SiO2 film on it is very sensitive to the mass change of SiO2. In this paper, humidity sensor for measuring humidity in atmosphere based on love wave mode on 42.75°Y-rotated cut quartz substrate with the propagation direction of [0°,132.75°,90°] with SiO2 waveguide layer deposited by APCVD is presented. Sensitivities of about 62 kHz/%RH for humidity were obtained. And maximum hysteresis is about 3%. Detail fabrication process corresponding to this type of sensors is reported.

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童筱钧 ,王心语.新型声表面波湿度传感器的研究[J].压电与声光,2014,36(5):727-729. TONG Xiaojun, WANG Xinyu. Study on a Novel SAW Humidity Sensor[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2014-09-25
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