A new method for deforming the poly(dimethylsiloxane) (PDMS) film is presented in this paper.An IDT is fabricated on a 128°-YX-LiNbO3 substrate for exciting surface acoustic wave,which is used to squezze the aqueous microfluid in the PDMS microgroove on the piezoelectric substrate by the help of the resistance from the hydrophilic surface.Then,the PDMS film is deformed by the pressure of the aqueous microfluid.Red dye solution is used to demonstrate the operation of the deformation of the PDMS film.Results show that the proposed method can deform PDMS film,and the electrical signal power,the volume of the aqueous microfluid and the thickness of the PDMS film do also affect the deformation.A minimum distance of 280 μm is obtained at the conditions of 13 μL of the volume of the aqueous microfluid,12.5 μm of the thickness of the PDMS film and 26.5 dBm of electric signal power.