Abstract:The operating principle of a voltage controlled piezoelectric ceramic actuator was introduced. Based on 0.5 μm Bipolar CMOS(BiCMOS) process of OKI Electric Industry Co.,a band gap reference(BGR) with high power supply rejection ratio(PSRR) and low temperature drift which was applied in the actuator was proposed.In order to further improve the PSRR of the circuit,a self voltage referenced low dropout linear regulator(LDO) was adopted to provide pseudo power supply voltage for the BGR.Curvature correction was realized through the introduction of improved piecewise linear current compensation technology.Thus the flexibility and precision of the temperature compensation was improved.HSPICE simulation results showed that the band gap voltage reference had a temperature coefficient of 2.3×10-6/℃ when the temperature ranged from -40 ℃ to 150 ℃,the PSRR was -174 dB at low frequency.