A piezoelectric vibrational power harvesting MEMS micro power with four cantilever beam center quality block structure for low frequency applications which converts environment vibration energy into electric energy is designed and manufactured.The heterogeneous integration manufacturing of the PZT piezoelectric thin film is accomplished by the Sol Gel process.The foundation structure of the MEMS micro power is fabricated by using micromachining technology and wire bonding technology.The output performance is evaluated by using vibration testing system.The tested results show that output peak peak voltage of the device increases linearly with the increase of acceleration at the resonant frequency of 8 Hz,and the output peak peak voltage is up to 82.4 mV at the acceleration excitation of 10 m/s2 .The maximum output power density is up to 2.074 3 μW/cm3 when the optimized resistance load is 2.0 MΩ.