ZnO thin films with different amounts of Cudoping were prepared by Sol-Gel method on the surface of glass. The effect of Cudoping on the morphology and structure of the thin films was investigated by using Atomic Force Microscope (AFM) and Xray diffraction ( XRD) . The results indicated that the Cudoping did not change the crystal structure of ZnO, but affected the intensity and position of the diffraction peak. The diffraction peak of ZnO∶Cu shifted to a higher angle compared with pure ZnO and the grain size increased, which implied that the lattice constant changed after Cu doping. In addition, according to the transmission spectra of ZnO, with more Cu doped into the samples, the films′ transmittance is reduced in the visible range and red shift of absorption edge occurred. Obviously, copper doping can reduce the band gap. It is found that the PL intensity of Cudoped ZnO films was weaker than that of ZnO films and could be well modulated by controlling the Cu concentration.