国家自然基金资助项目(61101038);四川关键技术研究发展 基金资助项目(2011GZ0220)
焦向全,张睿,马晋毅,杜波,钟慧,石玉.电极对薄膜体声波谐振器性能的影响[J].压电与声光,2015,37(3):373-376. JIAO Xiangquan, ZHANG Rui, MA Jinyi, DU Bo, ZHONG Hui, SHI Yu. Influence of Electrode on the Electrical Characteristics of Film Bulk Acoustic Resonator[J]. PIEZOELECTRICS AND ACOUSTOOPTICS
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