The thin film resistors with DC-20 GHz operating frequency were designed and fabricated on the glass glazed planarized modified BeO ceramic substrate. The simulation results by HFSS show that the voltage standing wave ratio(VSWR) of the designed thin film resistor is less than 1.2 at this frequency range. The thin film resistors were fabricated on the glass glazed planarized modified BeO substrate by RF magnetron sputtering and lithography process .The comparison of the test results and the simulation results show that the glass glaze layer on the surface of the BeO substrate don't have obvious adverse effects on the microwave properties of the resistor.