基于PVA/ST90°-X石英的Love波湿度传感器的实验研究
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国家自然科学基金资助项目(No. 11104314)

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Experimental Research on Love Wave Humidity Sensor Based on PVA/ST90°-X Quartz Structure
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    摘要:

    报道了覆盖聚合物敏感膜的Love波传感器的湿度检测性能。该传感器采用在ST90°-X石英基底上旋涂聚乙烯醇(PVA)膜作为波导层兼吸湿层,测量了密闭空间中相对湿度从9%增加到88%时器件的工作频率及损耗。实验表明,频率偏移和损耗增量均由吸附后质量负载所产生,其变化规律遵循第III类等温吸附曲线。

    Abstract:

    The humidity detection performance of a Love wave sensor coated with polymer film was reported. A polyvinyl alcohol(PVA) layer was spincoated on an ST90°-Xquartz substrate as the waveguide layer and absorbing layer. When the relative humidity in the closed test container was increased from 9% to 88%, the working frequency and insertion loss of the device were measured. Experiments showed that both frequency shifts and insertion loss increments were caused by the mass load of absorbed water vapor. The variations followed the III adsorption isotherm.

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王立君,刘建生,何世堂.基于PVA/ST90°-X石英的Love波湿度传感器的实验研究[J].压电与声光,2015,37(4):546-549. WANG Lijun, LIU Jiansheng, HE Shitang. Experimental Research on Love Wave Humidity Sensor Based on PVA/ST90°-X Quartz Structure[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2015-07-22
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