Based on the finite element analysis of surface wave propagation characteristics in a piezoelectric material, the multiphysics field coupling analysis software of COMSOL was used to simulate the single crystal ZnObased surface acoustic wave resonators. Symmetric mode and antisymmetric mode of the ZnO surface acoustic wave were established. The phase velocity and electromechanical coupling coefficient of the ZnO single crystal were calculated by the analysis of the resonance frequency. By analyzing the frequency response, the relationship of the resonator′s input admittance, impedance and frequency was obtained. Finally, the effect of IDT structure on the resonant frequency,antiresonant frequency were discussed. The more the IDT′s input and output interdigital electrode pair is,the larger the insertion loss and signal attenuation.