ZnO/蓝宝石结构声表面波频散特性数值计算
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Numerical Calculation of SAW Dispersion Properties Based on ZnO/Sapphire Structure
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    摘要:

    从理论上计算出ZnO/蓝宝石结构声表面波相速度和机电耦合系数k2色散曲线。计算显示,在ZnO膜厚和声表面波器件波长之比h/λ=0.48时,IDT/ZnO(c面)/蓝宝石(c面)结构西沙瓦波1次模式的k2最大值为2.705%,理论声速为4 982 m/s;在h/λ=0.3时,IDT/ZnO(a面)/蓝宝石(r面)结构西沙瓦波1次模式的k2最大值为4.34%,理论声速为5 509 m/s。结果表明,IDT/ZnO(a面)/蓝宝石(r面)结构西沙瓦波1次模式的k2和声速较大,适于研制高频低损耗声表面波滤波器。

    Abstract:

    The dispersion curves such as the phase velocity and electromechanical coupling coefficient(k2) were calculated theoretically in this paper. The result shows that Sezawa wave mode 1 on ZnO(c plane)/sapphire(cplane) structure has maximal k2 value of 2.705% and phase velocity 4 982 m/s at h/λ=0.48, and Sezawa wave mode 1 on ZnO(a plane)/sapphire(r plane) structure has maximal k2 value of 4.34% and phase velocity 5 509 m/s at h/λ=0.3, which means IDT/ZnO(a plane)/sapphire(r plane) structure has higher maximal k2 value and phase velocity of Sezawa wave mode 1.In other words,IDT/ZnO(a plane)/sapphire(r plane) structure is the better choice for designing high frequency and low loss SAW filter.

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董加和,陈运祥,赵雪梅,吕翼,朱勇,张显洪,张永川,李浩,鄢秋娟. ZnO/蓝宝石结构声表面波频散特性数值计算[J].压电与声光,2015,37(5):746-747. DONG Jiahe, CHEN Yunxiang, ZHAO Xuemei, LV Yi, ZHU Yong, ZHANG Xianhong, ZHANG Yongchuan, LI Hao, YAN Qiujuan. Numerical Calculation of SAW Dispersion Properties Based on ZnO/Sapphire Structure[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2015-09-18
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