基于石英基片的应变灵敏度分析
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北京市科委基金资助项目(Z131100004113002);北京市燃气集团有限责任公司基金资助项目(T13JK004);秦皇岛科技基金资助项目(201301B053)

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Analysis of Strain Sensitivity Based on Quartz Substrate
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    摘要:

    给出了一种声表面波(SAW)应变传感器石英基片各切向灵敏度的分析方法,以微扰理论为基础构建有限元模型计算应变量,并以此计算出SAW频率相对偏移量,分析计算不同切向下石英基片的应变灵敏度,并选取了应变灵敏度较高且温度灵敏度较低的STX切石英进行实验。实验测得应变灵敏度为0.382 kHz/με,与理论计算结果(0.590 kHz/με)基本一致,验证了理论分析方法的正确性。

    Abstract:

    A method was presented to analyze the sensitivity of surface acoustic wave strain sensor with substrate of different cuts of quartz.Based on perturbation theory, a finite element method model was established to calculate the strain and then the surface acoustic wave frequency offset was calculated. The strain sensitivity of different cuts of quartz were calculated and analyzed,from which the ST-X-cut quartz was selected due to its high strain sensitivity and low temperature sensitivity,and also experiments were carried out. The measured sensitivity of 0.382 kHz/με was consistent with that of the calculated result of 0.590 kHz/με.Therefore the theoretical method was accurate.

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李夏喜,郭霄鹏,白永强,刘晓彬,邢琳琳,汪彤.基于石英基片的应变灵敏度分析[J].压电与声光,2015,37(5):896-898. LI Xiaxi, GUO Xiaopeng, BAI Yongqiang, LIU Xiaobin, XING Linlin, WANG Tong. Analysis of Strain Sensitivity Based on Quartz Substrate[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2015-09-18
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