压电陶瓷迟滞建模及控制仿真
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Hysteresis Modeling and Control Simulation of Piezoelectric Ceramic
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    摘要:

    为了提高压电陶瓷驱动器在调节光学谐振腔长度时的精度,设计了一种压电陶瓷驱动系统。同时,为了改善压电陶瓷的迟滞特性,利用Duhem迟滞模型对其进行建模,利用梯度下降法对模型参数进行辨识,得到迟滞模型;并利用逆模型补偿及比例、积分、微分(PID)复合控制方法进行控制。实验结果表明,Duhem模型可以有效地拟合压电陶瓷驱动器的迟滞,在15 μm的范围内,最大拟合误差小于0.2 μm ;同时,在复合控制下,驱动器的最大控制误差为12 nm,表明该复合控制方法的有效性。

    Abstract:

    To improve the precision of piezoelectric ceramic actuator in adjusting the length of optical resonant cavity, a driving system of piezoelectric ceramic actuator was designed; meanwhile, in order to improve the hysteresis of piezoelectric ceramic, the hysteresis model was established by using the Duhem model. The hysteresis model has been obtained by using the gradient descent method to identify the model parameters. The actuator was controlled by using the inverse model compensation and PID method. The experimental result indicates that the Duhem model can effectively fit the hysteresis of the actuator, and the maximum error is less than 0.2 μm in a range of 15 μm; and in the compound control, the maximum error of the actuator is nearly 12 nm, this indicates the effectiveness of the compound control method.

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王晓东,江国栋.压电陶瓷迟滞建模及控制仿真[J].压电与声光,2015,37(6):926-929. WANG Xiaodong, JIANG Guodong. Hysteresis Modeling and Control Simulation of Piezoelectric Ceramic[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2015-12-16
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